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TARC may look at raising fares to help come back from financial challenges
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3) Photolithography:a) What wavelength illumination is required to achieve F = 0.25 µm with a NA = 1 and without theuse of phase-shifting masks?b) What wavelength illumination is required to achieve F = 0.25 µm with a NA = 0.5 and without theuse of phase-shifting masks?
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